Tem Eds. PDF fileEnergy table for EDS analysis 1 H 101 008 Hydrogen 2 He 400 019 Helium 3 Li 694 053 Lithium 93 Np 23705 Neptunium 94 Pu (244) Plutonium 95 Am (243) Americium 96 Cm (247) Curium 97 Bk (247) Berkelium 98 Cf (251) Californium 99 Es (254) Einsteinium 100Fm (257) Fermium 101Md (258) Mendelevium 102No (255) Nobelium 103 Lr (262) Lawrencium 89103.
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The anglelimiting aperture can be the objective aperture of TEM/STEM system or the entrance aperture of the EELS system which is smaller and dominates the beam intensity arriving at the camera Figure 4794a Schematic illustration of the broadening of electron beam within a thin specimen and of generations of EDS EELS and AES signals.
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PDF fileEDS SEM vs STEM (TEM) NFMC Spring School on Electron Microscopy April 2011 STEM (TEM) † e beam energy 100400keV † min probe size < 1nm † specimen thickness 1nm † interaction volume ~ Pm † The energy of the incident electron must be larger than ionization energy for a given shell.
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Energydispersive Xray spectroscopy (EDS also abbreviated EDX or XEDS) is an analytical technique that enables the chemical characterization/elemental analysis of materials A sample excited by an energy source (such as the electron beam of an electron microscope) dissipates some of the absorbed energy by ejecting a coreshell electron.